Semiconductor O-Rings & Seals

Semiconductor O-Ring & Seal Materials:

  • Perfluorinated (FFKM)
  • Fluorocarbon (FKM, VITON®)
  • Specialty Compounds

The semiconductor industry is utilizing increased levels of toxic fluids and gases, which place extreme demands upon seal design and materials. Not only to prevent system contamination from the external environment, but they must not contribute any contaminates to the system in their own right. Specific needs are required by each of the four primary environments employed by the semiconductor industry:

  • Gases & Vacuum
  • Thermal
  • Plasma
  • Wet Processing

Working conditions:

  • Temperatures: up to 300°C (572°F)
  • Pressures: vacuum to 10-9

Semiconductor Perflouorinated (FFKM) Compounds:

Brand Compound Number Datasheet Hardness (Shore A) Low Temp High Temp Color Recommended For
Parker Parofluor™ FF374-60 60 +- 5 5 608 Purple Low Particle Generation, Low Metal Ion Content
Parker Parofluor™ FF354-65 PDF 65 +- 5 5 608 White Low Closure Force
Parker Parofluor™ FF102-75 PDF 75 +- 5 5 525 Black Acid Resistant, General Purpose
Parker Parofluor™ FF106-75 PDF 75 +- 5 5 500 Black General Purpose
Parker Parofluor™ FF200-75 PDF 75 +- 5 5 608 Black Low Comp Set, AMS7257, FDA
Parker Parofluor™ FF302-75 PDF 75 +- 5 5 608 Brown Etch Resistant, Low Metal Ions
Parker Parofluor™ FF350-75 PDF 75 +- 5 5 608 White Plasma, High Purity, FDA, USP Class VI
Parker Parofluor™ FF352-75 PDF 75 +- 5 5 608 White General Purpose, Etch Resistant
Parker Parofluor™ FF370-75 PDF 75 +- 5 5 608 Black Low Particle Generation, Low Metal Ions
Parker Parofluor™ FF500-75 PDF 75 +- 5 5 550 Black Broad Chemical Resistance, FDA
Parker Parofluor™ FF580-75 PDF 75 +- 5 5 525 Black Steam Resistant, Amine/Base Resistant
Parker Parofluor™ V8545-75 PDF 75 +- 5 5 572 Black FDA, General Purpose
Parker Parofluor™ FF376-80 80 +- 5 5 508 Purple Low Particle Generation, Low Metal Ions
Parker Parofluor™ FF400-85 PDF 85 +- 5 -40 550 Black Low Temp, RGD Resistant
Parker Parofluor™ FF202-90 90 +- 5 5 608 Black Low Compression Set, Extrusion Resistant
Parker Parofluor™ FF582-90 PDF 90 +- 5 5 525 Black Steam Resistant, Amine/Base Resistant
Parker Parofluor™ V8581-90 PDF 90 +- 5 5 550 White Plasma Etch Resistant, Low Stiction
Parker Parofluor™ V8588-90 PDF 90 +- 5 5 572 Black Extrusion & RGD Resistant
Freudenberg Simriz® 70 Simriz® 491 PDF 70 +- 5 -20 230 Black Molded part, O-Rings, Diaphragms
Freudenberg Simriz® 75 Simriz® 494 PDF 75 +- 5 -15 230 Black Diaphragms on request, O-Rings
Freudenberg Simriz® 75 Simriz® 495 PDF 75 +- 5 -15 230 Black O-Rings
Freudenberg Simriz® 75 Simriz® 497 PDF 75 +- 5 -15 325 Black O-Rings
Freudenberg Simriz® 75 Simriz® 506 75 +- 5 -15 230 White Molded parts, O-Rings
Freudenberg Simriz® 80 Simriz® 492 PDF 80 +- 5 -10 230 Black Molded parts
Freudenberg Simriz® 85 Simriz® 496 PDF 85 +- 5 -15 250 Black O-Rings

Semiconductor Fluorocarbon (FKM, VITON®) Compounds:

Brand Compound Number Datasheet Hardness (Shore A) Low Temp High Temp Color Recommended For
Engineered Seal Products ESP-5001-V75 PDF 75 +- 5 -15 400 Black General purpose
Engineered Seal Products ESP-5002-V75 PDF 75 +- 5 -15 400 Black General Purpose
Engineered Seal Products ESP-5004-V90 PDF 90 +- 5 -15 400 Black General purpose
Parker V0986-50 PDF 50 +- 5 -15 400 Brown General Purpose
Parker V0763-60 PDF 60 +- 5 -15 400 Brown General Purpose
Parker V0769-60 PDF 60 +- 5 -15 400 Black General Purpose
Parker V1262-65 PDF 65 +- 5 -15 400 Black Low Swell - Flex Fuel, Blends UL listed
Parker VA150-65 PDF 65 +- 5 -15 400 Black General Purpose
Parker VW252-65 PDF 65 +- 5 -15 400 Green Low Swell
Parker V0680-70 PDF 70 +- 5 -15 400 Red FDA, USDA, NSF 51, USP Class VI
Parker VB185-70 PDF 70 +- 5 -15 400 Black Acid Resistant, Steam
Parker V0747-75 PDF 75 +- 5 -15 400 Black AMS-R-83248, TY I, CL I, UL listed
Parker V0848-75 PDF 75 +- 5 -15 400 Black PTFE Loaded
Parker V0884-75 PDF 75 +- 5 -15 400 Brown General Purpose, UL listed
Parker V1163-75 PDF 75 +- 5 -35 400 Black "GFLT Type", UL listed
Parker V1164-75 PDF 75 +- 5 -15 400 Black Low Compression Set
Parker V1226-75 PDF 75 +- 5 -15 400 Brown Low Compression Set, AMS 7276, UL listed
Parker V1260-75 PDF 75 +- 5 -15 400 Black Very Chemically Resistant, "Viton Extreme" Type
Parker V1263-75 PDF 75 +- 5 -15 400 Black Low Swell, Flex Fuel Blends, UL listed
Parker V1289-75 PDF 75 +- 5 -55 400 Black AMS 7379, Low Temp.
Parker V1436-75 PDF 75 +- 5 -15 400 Black General Purpose, UL Listed
Parker V1475-75 PDF 75 +- 5 -15 400 Black General Purpose, X-rings
Parker V1476-75 PDF 75 +- 5 -15 400 Brown General Purpose
Parker VA151-75 (19357) PDF 75 +- 5 -15 400 Black General Purpose, UL listed
Parker VA203-75 (16737) PDF 75 +- 5 -15 400 Black Extrusion Resistant, Diesel Fuel Injectors
Parker VB153-75 (19717) PDF 75 +- 5 -15 400 Black Good Compression Set, Fuels
Parker VG162-75 (19727) PDF 75 +- 5 -15 400 Black Good Compression Set, "GF" Type
Parker VG292-75 PDF 75 +- 5 -15 400 Black Engine Coolant Biodiesel Resistant
Parker VM100-75 PDF 75 +- 5 -15 400 Black AMS 7276, Low Compression Set
Parker VM125-75 PDF 75 +- 5 -40 400 Black "GLT" Type, AMS-R-83485
Parker VM128-75 PDF 75 +- 5 -40 400 Black "GLT" Type, AMS-R-83485
Parker VM835-75 PDF 75 +- 5 -40 400 Black "GLT" Type, AMS-R-83485
Parker VW153-75 (16129) PDF 75 +- 5 -15 400 Brown General Purpose
Parker VW173-75 75 +- 5 -15 400 Green Automotive Applications
Parker VW263-75 PDF 75 +- 5 -15 400 Brown Biodiesel Resistant
Parker 16327-75 75 +- 5 -15 400 Green Automotive Fuel Quick Disconnects, Good Fuel andPermeation Resistance
Parker V1274-80 PDF 80 +- 5 -15 400 Black USP Class VI, ISO 10993, FDA, Low Swell
Parker VA163-80 (19318) PDF 80 +- 5 -15 400 Black Internally Lubed
Parker VG286-85 PDF 85 +- 5 -50 400 Black ISO 23936 RGD & Extrusion Resistant, Low Compression Set
Parker VP104-85 PDF 85 +- 5 10 400 Black Base Resistant
Parker V0709-90 PDF 90 +- 5 -15 400 Black AMS-R-83248, TY 1, CL 2, AMS 7259
Parker V0894-90 PDF 90 +- 5 -15 400 Brown General Purpose
Parker V1411-90 PDF 90 +- 5 -15 400 Black General Purpose
Parker V1412-90 PDF 90 +- 5 -15 400 Brown General Purpose
Parker VA153-90 PDF 90 +- 5 -15 400 Black General Purpose
Parker VW155-90 PDF 90 +- 5 -15 400 Green General Purpose
Parker VG109-90 PDF 90 +- 5 -50 400 Black ISO 23936 RGD & Extrusion Resistant, Low Compression Set
Parker V1238-95 PDF 95 +- 5 -15 400 Black Extrusion & RGD Resistant
Freudenberg 75 FKM 180497 PDF 75 +- 5 -25 200 Black O-Rings
Freudenberg 70 FKM 37508 PDF 75 +- 5 -25 200 Red O-Rings, Molded parts, Diaphragms